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Ngā Wāhanga E manawapa ana mō ngā Taputapu Whakamātautau Āhua-whakahaere
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Kawe Taputapu Pereti Ukume Ārahi
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Ngā Taputapu Ārahi-Haumaru Ngā Wāhanga E Tāpui Ana i te Uku
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Mowhiti Hiri Ukume Alumina Parakore-Teitei mō te Hiritanga Rūma Pāmahana-Teitei
Kua hangaia te mowhiti hiri uku a St.Cera hei whakakapi mō ngā mowhiti-O polymer i roto i ngā taiao tino kino ka pakaru ngā elastomers. He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka whakamahia tēnei mowhiti hiri pakari i roto i ngā tono hiri pūmau — he mea hono tahi me te konganuku ngohengohe, te gasket graphite rānei — hei whakarato i te pupuri pono i te korehau, i te hau rānei i ngā pāmahana tae atu ki te 800°C me roto i ngā taiao plasma, matū rānei e kaha ana. Kāore he hau e puta mai ana i te rauemi, he kaha pēhi teitei (kaha piko o raro 361 MPa), me te koretake matū (ātete ki ngā halogens, waikawa, me ngā kawakore engari ko te HF). Mā ngā mata hiri kua oti te whakakī (papatahi ≤5 μm, taratara mata Ra ≤0.2 μm) ka whakarite kia kore e turuturu te pa ki ngā wāhanga konganuku, uku rānei.
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Mowhiti Arotahi Rūma Alumina Parakore-Teitei mō ngā Pūnaha Plasma Etch me CVD
Ko te mowhiti arotahi rūma a St.Cera he wāhanga kete tukanga nui e whakamahia ana i roto i ngā taputapu whakairo plasma, CVD, me te PVD semiconductor. He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka karapoti te mowhiti i te taha o te wafer hei whakawhāiti i te plasma me te arotau i te tohatoha koki katote, kia pai ake ai te ōrite o te whakairo puta noa i te mata o te wafer. Ka tukuna e te rauemi he ātete plasma tino pai, he kaha dielectric teitei (15 × 10⁶ V/m), me te pumau wera tae atu ki te 1600°C, e whakarite ana i te pono mo te wa roa i roto i ngā taiao plasma e hangai ana ki te fluorine, ki te chlorine rānei. Mā te ID/OD me te papatahi o te whenua (≤10 μm) ka taea te whakanoho tika i te taha o te wafer, ka whakaiti i ngā hapa taha me te whakaputa matūriki.
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Mowhiti Ukume Alumina Parakore-Teitei mō ngā Rūma Tukanga CVD / PVD
He mea hanga motuhake te mowhiti uku a St.Cera mō te whakamahi i roto i ngā rūma tukatuka CVD (Te Whakatakotoranga Kohu Matū) me te PVD (Te Whakatakotoranga Kohu Tinana). He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka mahi tēnei mowhiti hei arai rūma, hei mowhiti arotahi, hei wāhanga kete tukatuka rānei hei aukati i te plasma me te tiaki i ngā pakitara rūma mai i te horo. He pai te ātete plasma o te rauemi, he kaha dielectric teitei (15×10⁶ V/m), me te pumau wera tae atu ki te 1600°C, e whakarite ana i te roa o te ora ratonga i roto i ngā taiao plasma e hangai ana ki te fluorine. Mā ngā ātete ā-ahu tika (±0.05 mm i runga i te ID/OD) me te papatahi (≤10 μm) ka taea te whakanoho i te taha wafer rite tonu, te whakapai ake i te ōritetanga o te whakatakotoranga me te whakaiti i te whakaputanga matūriki.
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Pūwhakaputa Mutunga Uku Bernoulli — Te Whakahaere i te Wafer Kore-Pa atu mō ngā Wafer Angiangi me te Pakaru
Ka whakamahia e te taputapu pito uku Bernoulli a St.Cera te hiki ā-rangi hei whakahaere i ngā papa me te kore e pā atu ki te tinana. He mea hanga mai i te 99.8% alumina (Al₂O₃) te silicon carbide (SiC) rānei, he tino parakore, ā, kei roto ngā pūwero mīhini-tika e pana ana i te hau pēhanga hei hanga i tētahi kiriata hau angiangi i waenganui i te taputapu pito me te papa. Mā tēnei mātāpono kore-pā ka whakakorea te poke o te taha o muri, te pakaru o te taha, me te kino o te mata, he mea tino pai mō ngā papa angiangi (≤100 μm), pakarukaru, piko rānei. Ka whakaratohia e te papa uku he kaha piko teitei (361 MPa mō te Al₂O₃; tae atu ki te 550–600 MPa mō te SiC), he iti te papatipu, me te pumau o te āhua, e whakarite ana i te tūnga ka taea te whakahoki i roto i ngā karetao whakawhiti papa tere-teitei.
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Ngā Wāhanga Ukume Alumina Parakore-Teitei mō ngā Whakamahinga Ā-Haumaru me ngā Whakamahinga Ahumahi
E hanga ana a St.Cera i ngā wāhanga uku alumina (Al₂O₃) kua oti te mīhini kia rite ki ngā whakaritenga a te kiritaki. Mā te whakamahi i te alumina parakore 99.8%, ka tukuna e ēnei wāhanga he kaha piko tino pai (361 MPa), he pakeke teitei (16 GPa), me te kaha dielectric tino pai (15×10⁶ V/m). I hangaia mō ngā taputapu semiconductor, ngā huihuinga ātete-kakahu, ngā ārai hiko, me ngā taputapu pāmahana teitei, ka tukuna e te rauemi he mimiti wai tata ki te kore (0%) me te tauwehenga whānui wera o te 7.2×10⁻⁶/℃, e whakarite ana i te pumau o te taha i raro i ngā āhuatanga tino kino.
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Pūwero Korehau Uku Porowhita mō te Whakahaere Wafer Piko
He mea hanga te pūwero uku porous a St.Cera mai i te alumina tino parakore me te porosity tuwhera ōrite o te 30–45% me te rahi o ngā pūwero mai i te 10 ki te 100 μm. He rerekē ki ngā pūwero haehae noa, ka tukuna e te mata porous te korehau tohatoha puta noa i te taha o muri o te wafer, ka pupuri pai i ngā wafer piko, angiangi, takitahi rānei me te kore e hiki ake te taha, e whati rānei. Ka ārai hoki te korehau ngawari (ka taea te whakarite mā te aukati) i te tohu o te taha o muri.
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Pūwero Korehau Ukume Porowhita-Alumina mō te Whakahaere Wafer Angiangi
Ko te pūwero porous a St.Cera he mea hanga mai i te 99.6% Al₂O₃ tino parakore me te pūwero tuwhera whakahaeretia o te 30–45% me te rahi o ngā pūwero ōrite mai i te 10 ki te 50 μm. Kāore i rite ki ngā pūwero kua haehaea, ka tukuna e te mata pūwero he korehau tohatoha puta noa i te taha o muri o te wafer, ka whakakore i te tohu taha, ā, ka taea te pupuri mārie i ngā wafer tino angiangi (≤100 μm) me ngā wafer kua piko. Ka tukuna e te rauemi te kaha piko ≥250 MPa me te pumau wera tae atu ki te 400°C i te hau.
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Pereti Tohatoha Hau Alumini mō te Pane Kaukau CVD/PVD
He mea hanga tika te pereti tohatoha hau (upoko kaukau) a St.Cera mai i te uku alumina 99.8% te parakore. He maha ngā kōhao moroiti (diameters 0.3–1.5 mm) e whakarite ana i te rere ōrite o te hau puta noa i te mata o te wafer i te wā o ngā tukanga CVD, PVD, ALD rānei. Nā te kaha teitei o te dielectric o te pereti (>15×10⁶ V/m) me te ātete plasma e mea nui ai mō te whakatakotoranga kiriata angiangi semiconductor.
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Pine Tautoko Uku mō ngā Taputapu Tukanga Ārahi-Hau
Ko ngā pine tautoko uku a St.Cera (e mōhiotia ana ko ngā pine hiki, ko ngā pine tautoko rānei) e whakamahia ana i roto i ngā rūma tukatuka haurua-haurua hei hiki ake i ngā papa, i ngā papa rānei i te wā e whakamahia ana, e whakamahanahia ana, e whakamataohia ana rānei. He mea hanga mai i te 99.8% alumina, silicon nitride rānei, ā, he kaha pēhi teitei ēnei pine, he pumau wera, he ātete matū hoki. Mā te hoahoa pito porowhita, papatahi rānei ka ārai i te rakuraku o ngā papa.
