Mowhiti Arotahi Rūma Alumina Parakore-Teitei mō ngā Pūnaha Plasma Etch me CVD

Ko te mowhiti arotahi rūma a St.Cera he wāhanga kete tukanga nui e whakamahia ana i roto i ngā taputapu whakairo plasma, CVD, me te PVD semiconductor. He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka karapoti te mowhiti i te taha o te wafer hei whakawhāiti i te plasma me te arotau i te tohatoha koki katote, kia pai ake ai te ōrite o te whakairo puta noa i te mata o te wafer. Ka tukuna e te rauemi he ātete plasma tino pai, he kaha dielectric teitei (15 × 10⁶ V/m), me te pumau wera tae atu ki te 1600°C, e whakarite ana i te pono mo te wa roa i roto i ngā taiao plasma e hangai ana ki te fluorine, ki te chlorine rānei. Mā te ID/OD me te papatahi o te whenua (≤10 μm) ka taea te whakanoho tika i te taha o te wafer, ka whakaiti i ngā hapa taha me te whakaputa matūriki.

Ngā Whakatakotoranga(i runga i te 99.8% Al₂O₃):

Ngā tono:

• · Ngā mowhiti arotahi rūma whakairo dielectric (waikura, whakairo nitride)
• · Ngā mowhiti taha rūma whakairo silicon
• · Ngā mowhiti kete tukanga rūma CVD
• · Ngā mowhiti ārai me ngā mowhiti rawhi rūma PVD

Tukanga Hanga:

Ka pēhia te paura alumina tino parakore mā te isostatic → ka mīhinihia ki te mīhini matomato kia tata ki te āhua kupenga → ka whakakāhia ki te 1600°C → ka huri taimana CNC o te ID, OD, me te matotoru → ka tākaihia kia tutuki ai te papatahi ≤10 μm → ka horoi ultrasonic → ka tirotirohia 100% CMM. Ka whakaitihia te piri o te matūriki e te mutunga o te mata Ra ≤0.4 μm.

Mana Kounga:

• · Tirotiro ā-ahu 100% (ID, OD, matotoru, whakarara)
• · Whakamātautau wero tae mō ngā pakaru iti (kāore e whakaaetia ngā pakaru)
• · Tirotiro ā-kanohi i raro i te karuārai 20× — kāore he maramara, he āputa, he tae kore rānei
• · Whakamātautau kaha whakapūmau i runga i te ASTM D149 (tauira)

Ngā Painga i runga i ngā Mowhiti Arotahi Silicon, Quartz rānei:

• · 5–10× te roa ake o te ora i roto i te plasma fluorocarbon
• · Kāore he matūriki horo e pau ana hei whakapoke i ngā papa
• · Ka ārai te kaha dielectric teitei i te arcing
• · Ka mau tonu te papatahi me te tika o ngā āhuatanga mō ngā mano hāora RF

Rauemi Rerekē — Zirconia Whakapūmau-Yttria (ZrO₂):

Mō ngā tono e hiahia ana kia kaha ake te pakaru (hei tauira, ngā rūma e tere ana te huringa wera, te ru miihini rānei), kei te wātea ngā mowhiti arotahi ZrO₂ (kiato 6.03 g/cm³, kaha piko 1000 MPa, kaha pakaru 5–8 MPa·m¹/²). Heoi, he pai ake te utu o te alumina, ā, koinei te paerewa ahumahi mō te nuinga o ngā tono mowhiti arotahi.

Whakaritenga:

• · Ngā kōtaha taahiraa, ngā pū kōhao, ngā kōhao whakairi rānei mō ia tuhi a te kiritaki
• · Paninga Y₂O₃ hei whakarei ake i te ātete ki te horo o te toto (matotoru 20–100 μm)
• · Te tohu laser o te tau wāhanga, te waehere rā, ngā tohu whakarārangi rānei

Tuhipoka:Ko ngā raraunga katoa e whai pū ana i te ripanga āhuatanga Al₂O₃ kua tukuna. Mō ngā whakatakotoranga ZrO₂, tirohia te pepa raraunga zirconia kua tukuna. Tērā pea me whai whakaaetanga patent ngā hoahoa mowhiti arotahi — ko ngā kiritaki te kawenga mō te manatoko i ngā mana pupuri hinengaro.