Pereti Tohatoha Hau Alumini mō te Pane Kaukau CVD/PVD
He mea hanga tika te pereti tohatoha hau (upoko kaukau) a St.Cera mai i te uku alumina 99.8% te parakore. He maha ngā kōhao moroiti (diameters 0.3–1.5 mm) e whakarite ana i te rere ōrite o te hau puta noa i te mata o te wafer i te wā o ngā tukanga CVD, PVD, ALD rānei. Nā te kaha teitei o te dielectric o te pereti (>15×10⁶ V/m) me te ātete plasma e mea nui ai mō te whakatakotoranga kiriata angiangi semiconductor.
Ngā Whakatakotoranga:
| Taonga | Uara |
| Rauemi | 99.8% Al₂O₃, SiC rānei |
| Diameter | 100 – 1500mm (porowhita) tapawhā rānei |
| Matotoru | 5 – 20 mm |
| Te whānui o te kōhao | 0.3 – 1.5 mm |
| Tauira Pūaha | Ritenga (tapatoru, tapawhā, porowhita) |
| Papatahi | ≤10 μm puta noa i te rohe katoa |
| Te Pākari o te Mata | Ra ≤0.6 μm (taha hau) |
| Ōwehenga Rohe Tuwhera | 5–15% |
Ngā tono:
Ngā pereti upoko kaukau PECVD
Ngā werohanga hau ALD
Ngā pereti tohatoha hau rūma whakairo
Ngā wāhanga tauhohenga MOCVD
Te Hanga:
Papa konumohe kua pania ki te papatahi → Keri CNC me ngā taputapu pania taimana (te ātete ki te tūnga kōhao ±0.02 mm) → tango i ngā pakaru → horoi ultrasonic → takai Akomanga 100.
Mana Kounga:
Ka tirotirohia 100% ia pereti mō te rahi o te kōhao (pūnaha tirohanga), te papatahi (whakawhitiwhiti laser), me te ōritetanga o te rere o te hau (mahere pēhanga). Kāore he kapiti moroiti i raro i te karuārai 20x.
Ngā Painga ki ngā Pereti Whakarewa:
Kāore he poke whakarewa i roto i ngā kiriata angiangi
He iti ake te whakaputanga matūriki (kāore he kirikiri waikura)
Ka ātete ki ngā plasma horoi kaha (CF₄, NF₃)
Ngā Āhuatanga Ritenga:
Ngā awa hau o muri, ngā kōhao poka-ārai, ngā hiri taha, me ngā momo rauemi rerekē (SiC mō te kawe wera teitei ake, te paninga Y₂O₃ mō te ātete plasma).
Ka whakaratohia e mātou te manatoko CAD me te whakatauira rere i mua i te hanga.
