Pūwero Korehau Uku Porowhita mō te Whakahaere Wafer Piko
He mea hanga te pūwero uku porous a St.Cera mai i te alumina tino parakore me te porosity tuwhera ōrite o te 30–45% me te rahi o ngā pūwero mai i te 10 ki te 100 μm. He rerekē ki ngā pūwero haehae noa, ka tukuna e te mata porous te korehau tohatoha puta noa i te taha o muri o te wafer, ka pupuri pai i ngā wafer piko, angiangi, takitahi rānei me te kore e hiki ake te taha, e whati rānei. Ka ārai hoki te korehau ngawari (ka taea te whakarite mā te aukati) i te tohu o te taha o muri.
Ngā Whakatakotoranga(i runga i te 99.6% Al₂O₃):
| Taonga | Uara |
| Pūngao | 30–45% |
| Rahi Pore Toharite | 10–100 μm (ka taea te whiriwhiri) |
| Kaha Whakapiko | ≥250 MPa |
| Papatahi (neke atu i te 300mm) | ≤5 μm |
| Whakaotinga Mata | Kua taupokina (Ra 0.8 μm) |
| Taumata Korehau Mōrahi | -80 kPa |
| Te pāmahana whakahaere | 400°C (hau), 600°C (kore e mahi) |
| Rauemi | 99.6% Al₂O₃, ZrO₂, SiC rānei |
Ngā tono:
Te huri i te taha whakamuri o te anga angiangi (≤50 μm)
Te whakapiringa angiangi piko mō te tapatapahi
Te tango i te mate takitahi mai i te rīpene
Te whakahaere i te papa karaihe
Te Hanga me te Kounga:
Paura uku i konatunatua ki ngā kaihanga pore waro → pēhia → whakakā → tāpirihia kia matotoru rawa. Ka whakamātauria ia chuck mō te ōritetanga o te korehau (≤5% te rerekētanga) ā, ka tirotirohia mō te tohatoha rahi o ngā pore (SEM). Ka inehia te papatahi ki te ine whakawhiti laser.
Ngā Painga ki ngā Chuck Grooved:
Kāore he tohu taha wafer, he nekehanga mate rānei
Ka pupuri i ngā angaanga piko (tae atu ki te 500 μm te whānui)
Ka whakakore i te aukati o te kōhao korehau
Tautoko whakaōrite-ake mō ngā papa angiangi
Whakaritenga:
He āhua porowhita, he āhua tapawhā rānei, tae atu ki te 600 mm te rahi. Ka taea e mātou te whakamahi i ngā mowhiti hiri taha, i ngā ārai korehau rohe rānei. Kei te wātea ngā momo whakarewa mō ngā whakaritenga pakari teitei.
Tonoa he tauira mō tō rahi angiangi me tō whakamātautau whatu.
