Pūwhakaputa Mutunga Uku Bernoulli — Te Whakahaere i te Wafer Kore-Pa atu mō ngā Wafer Angiangi me te Pakaru

Ka whakamahia e te taputapu pito uku Bernoulli a St.Cera te hiki ā-rangi hei whakahaere i ngā papa me te kore e pā atu ki te tinana. He mea hanga mai i te 99.8% alumina (Al₂O₃) te silicon carbide (SiC) rānei, he tino parakore, ā, kei roto ngā pūwero mīhini-tika e pana ana i te hau pēhanga hei hanga i tētahi kiriata hau angiangi i waenganui i te taputapu pito me te papa. Mā tēnei mātāpono kore-pā ka whakakorea te poke o te taha o muri, te pakaru o te taha, me te kino o te mata, he mea tino pai mō ngā papa angiangi (≤100 μm), pakarukaru, piko rānei. Ka whakaratohia e te papa uku he kaha piko teitei (361 MPa mō te Al₂O₃; tae atu ki te 550–600 MPa mō te SiC), he iti te papatipu, me te pumau o te āhua, e whakarite ana i te tūnga ka taea te whakahoki i roto i ngā karetao whakawhiti papa tere-teitei.

Tuhipoka mō ngā Rauemi:Ko te Alumina (Al₂O₃) te rauemi e whakamahia whānuitia ana mō ngā pito uku i roto i te whakahaere i ngā papa haurua-irahiko nā tōna huinga pai o te pakeke, te ārai hiko, te pumau matū, me te whai huatanga utu. Ka tukuna e te Silicon carbide (SiC) he kawe wera teitei ake, he pakeke ake, me te ātete kakahu pai ake mō ngā tono tino uaua. Ahakoa he kaha te pakaru o te zirconia kua whakapūmautia e te yttria (ZrO₂) i te pāmahana rūma, he iti ake te whakamahinga i roto i tēnei tono nā tōna kiato teitei ake me ngā āhuatanga whānui wera rerekē; ka whakaarohia pea mō ngā horopaki motuhake e hiahiatia ana te pakari pakaru tino pai. Tena koa whakapā atu ki tā mātou tīma hangarau mō ngā aratohu kōwhiringa rauemi.

Ngā Whakatakotoranga(i runga i te 99.8% Al₂O₃):

Te Mātāpono Whakahaere:

Ka tukuna te hau kōpeke, te hauota rānei (0.2–0.6 MPa) mā roto i ngā awaawa o roto, ā, ka puta mā roto i ngā pūwero tika. Ka hangaia e te rere o te hau tere he rohe pēhanga iti i runga ake i te kaiwhakaputa mutunga (te pānga Bernoulli), ka whakaputa i te kaha hiki e tautoko ana i te wafer i te āputa o te 50–200 μm. Kāore he kōhao korehau, he papa rānei e pā ana ki te taha muri o te wafer.

Ngā tono:

• · Te whakahaere i te anga angiangi (≤50 μm) i muri i te hurihanga o muri
• · Te kawe i te anga whakapiko (hei tauira, i muri i te CVD, i te whakamahana rānei)
• · Te whakawhiti i te pūtau rā me te papa sapphire LED
• · Te aunoatanga o te rūma horoi e kore e hiahiatia he whakaputa matūriki
• · Te whakahaere i te papa karaihe i roto i te hanga whakaaturanga

Tukanga Hanga:

Papa uku i whakakoihia mai i te paura parakore teitei → miihini CNC tuaka-5 o ngā awa hau me ngā kōhao ihu (diameter 0.3–1.0 mm, manawanui ±0.01 mm) → te whakapiri mata ki Ra ≤0.4 μm → horoi ultrasonic → whakamātautau turuturu herium (ngā awa hau). Kāore e hiahiatia he paninga — he koretake te mata uku tahanga, ā, kāore e poke.

Mana Kounga:

• · Tirotiro ā-ahu 100% (CMM) o ngā tūranga o te pūwero, te roa o te ringa, me te papatahi
• · Whakamātautau ōritetanga o te rere o te hau: te hekenga pēhanga ≤5% puta noa i ngā pūwero katoa
• · Whakamātautau turuturu: kua hiritia ngā awa hau ki te 0.6 MPa, kāore he hekenga pēhanga i roto i te 30 hēkona
• · Tirotirohia i raro i te karuārai 20× mō ngā kapiti iti, ngā kōhao rānei

ANgā painga ki ngā Kaiwhakapā Mutunga Tuku Iho:

• · Kāore he poke o te tuara o te papa angiangi — kāore he pānga ā-mīhini
• · Kāore he tapa e pakaru, e whati rānei o ngā angiangi angiangi
• · Ka taea te pupuri i ngā anga piko (tae atu ki te 1 mm te piko) me te āputa pumau
• · Whakakorea te tiaki i te whakaputa korehau me te pūwero porous
• · Ka ātete te hanganga uku i te pakaru me te whakaekenga matū

Whakaritenga:

• · E wātea ana mō ngā rahi wafer 200 mm, 300 mm, ngā rahi wafer ritenga rānei
• · Ngā tauira o te pūwero hau: ngā momo tika, koki, āwhiowhio rānei
• · Ngā rauemi: alumina (paerewa) te silicon carbide rānei (mō te kawe wera me te ātete ki te kakahu)
• · Te roa o te ringa, te flange whakairi, me te taunga tauranga hau e ai ki te tuhi OEM

Ngā Here:

Ko te whakatinanatanga o te mātāpono Bernoulli (te hoahoa o te pūwero, te āputa hau) kei tua atu i te whānuitanga o ngā ripanga āhuatanga rauemi kua whakaratohia. Ko ngā āhuatanga ā-pūkaha me te ā-wera i runga ake nei e whai ana i ngā pepa raraunga kua whakaratohia mō te 99.8% Al₂O₃. Kāore e tumanakohia he hekenga mahi o te uku i raro i te rere hau pēhanga i runga i ēnei āhuatanga rauemi. Mō ngā anga e pāngia ana e te rere hau (hei tauira, ngā MEMS me ngā hanganga pakarukaru), me whakarerekē te pehanga hau me te hoahoa pūwero kia rite ki tēnā.