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Ngā Wāhanga Ukume Mowhiti Ukume Tika-Teitei o te Alumina
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Ngā Taputapu Ārahi-ā-Waka Whakaritenga a ST.CERA
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Pūwhakaputa Mutunga Ukume Silicon Carbide (SiC) – Te Pakari Nui mō te Whakahaere i te Wafer Pāmahana-Tiketike
Ko te pūwhakamahi pito uku SiC a St.Cera he mea hanga mai i te silicon carbide parakore-teitei (99.72% te ihirangi SiC, 0.05% te Si kore utu) mā te whakamahi i te rauemi puranga S1111. He tino pai ngā āhuatanga miihini: te kaha piko 449 MPa (inehia), te modulus elastic 457 GPa (inehia), me te pakeke Vickers 25–28 GPa (noa). Ko te iti o te mātotoru (3.10–3.15 g/cm³, noa) e whakarato ana i te pakari motuhake teitei, he mea pai mō ngā karetao whakawhiti wafer tere-teitei. Me te kawe wera o te 120–150 W/m·K (noa) me te tauwehenga whānui wera o te 4.0–4.5×10⁻⁶/℃ (noa), ka tino marara te wera o tēnei pūwhakamahi pito, ā, ka mau tonu te pumau o ngā āhuatanga i te wā e whakahaerea ana i te pāmahana teitei (tae atu ki te 1600–1700°C, kāore he kawenga). Ko te tae mangu/hina me te kore mimiti wai ka whakarite kia hototahi ki te rūma ma.
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He Pūwero Korehau e Hangaia ana e te Silicon Carbide (SiC) mō ngā Taiao Pāmahana-Tiketike me te Plasma
Ko te pūwero uku SiC a St.Cera he mea hanga mai i te waro silicon carbide tino parakore (puranga S1111, SiC 99.72%, Si kore utu 0.05%). Ka tukuna e ia te kaha piko kua inehia o te 449 MPa, te pakari pakaru o te 3.12 MPa·m¹/², me te modulus elastic o te 457 GPa. Ko te kawe wera noa o te rauemi (120–150 W/m·K) me te iti o te horapa wera (4.0–4.5×10⁻⁶/℃) ka taea te piki tere i te pāmahana me te iti o te piko o te wafer i te huringa wera. Ka taea te whirihora i te chuck hei chuck korehau porous (rere hau ōrite) hei chuck paerewa kua haehaea rānei. Me te pāmahana whakamahinga mōrahi o te 1600–1700°C (kāore he kawenga) me te ātete tino pai ki te horo o te plasma, he pai tēnei chuck mō te tukatuka wafer pāmahana teitei (whakamahana, RTP) me ngā rūma keri kaha e pakaru ana ngā chuck alumina.
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Ngā Taputapu Ārahi-ārahi Ngā Wāhanga E Tāpui Ana i te Uku Ngā Kawe Uku
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Mowhiti Huri Ukume Alumina i Tautokohia e te Mea Whakarewa mō ngā Mahi Whakamau Pūmau
Ko te mowhiti huri alumina whakarewa a St.Cera e whakakotahi ana i te paparanga kakahu uku alumina parakore teitei (99.8% Al₂O₃) me te paparanga whakarewa i hangaia kia tino tika (ko te nuinga he konumohe, he kowiri tira rānei). Mā tēnei hoahoa ranu ka whakaratohia te ātete kakahu tino pai me te koretake matū o te uku ki runga i te mata huri, i te mea ka tāpirihia e te turanga whakarewa te kaha miihini, te ngāwari o te whakairi, me te ātete ki te pakaru pakarukaru. Ka tukuna e te paparanga alumina te kaha piko o te 361 MPa, te pakeke Vickers o te 16 GPa, me te pumau wera tae atu ki te 800°C. Kua whakaritea te turanga whakarewa ki ngā kōhao whakairi, ngā pine kimi, ngā āhuatanga aukume rānei hei whakauru ki roto i ngā mīhini whakapiri, ngā huri aorangi, me ngā taputapu CMP.
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Ngā Wāhanga E manawapa ana mō ngā Taputapu Teihana Tirotiro Ārahi
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Te Tukatuka Whakaritenga o te Chuck Wafer Uku Al2O3
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Pereti Uku Taputapu Ārahi-Haumaru Whakaritenga a ST.CERA
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Pūwero Korehau Alumina 12-Inihi mō te Tukatuka Wafer 300mm
Ko te pūwero korehau 12-inihi a St.Cera he mea hanga ki te 99.8% alumina parakore-teitei (Al₂O₃) mō te whakahaere i te wafer 300mm. He mata kōhao pai te pūwero (te whānui kōhao 0.5–1.0 mm, te piko 2–3 mm) hei whakarite kia tohatohahia te korehau puta noa i te diameter 300mm katoa. Ka mau tonu te papatahi i roto i te 5 μm, ka taea ai te mau tonu i te wafer kore-whakapiko i te wā e tapatapahia ana, e huri ana i te taha o muri, me te tirotiro. Ko te kaha piko teitei o te rauemi (361 MPa) me te pakeke (16 GPa) e whakamana ana i te pumau o te taha roa ahakoa i raro i ngā huringa korehau maha.
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Kaiwhakaputa Mutunga Ukume Alumina me ngā Hongere Korehau Whakauru
Ka whakauruhia e te miihini mutunga korehau alumina a St.Cera ngā hongere korehau kua oti te mīhini me ngā kōhao momi tika ki roto i te tinana alumina tino parakore 99.8%. Ka whakakorehia e tēnei hoahoa ngā papa korehau o waho, ka taea ai te tango tika i te wafer me te kaha pupuri ōrite. Mā te kaha piko teitei o te rauemi (361 MPa) me te pakeke (16 GPa) ka mau te pumau o te taha mō te wā roa i raro i ngā huringa korehau maha. Ka mau tonu te papatahi puta noa i te rohe papa i roto i te 10 μm, ka ārai i te ahotea me te pakaru o te wafer. Kei te flange whakapuru o muri ngā tauranga korehau hei whakauru ngāwari ki ngā ringa karetao OEM.
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Ngā Wāhanga Ukume Alumina Haumaru-ESD mō te Whakahaere Wafer Tairongo-Pūmau
Ko ngā wāhanga uku alumina haumaru ESD (electrostatic discharge) a St.Cera he mea hanga mai i te 99.8% Al₂O₃ parakore teitei me te ātete mata kua whakaritea o te 10⁶–10⁹ Ω/sq, ka tutuki mā te tukanga tāpiri, paninga rānei. Ka whakakorea e ēnei wāhanga te utu pateko, ka ārai i te kino hiko pateko ki ngā papa me ngā taputapu haurua-ira tairongo. Ka mau tonu te rauemi turanga i tōna kaha piko teitei (361 MPa), te pakeke (16 GPa), me te kaha dielectric (15×10⁶ V/m). Kei roto i ngā wāhanga uku haumaru-ESD ngā pito mutunga, ngā pine hiki, ngā ara ārahi, me ngā taputapu ritenga mō te aunoatanga FAB.
