Mowhiti Ukume Alumina Parakore-Teitei mō ngā Rūma Tukanga CVD / PVD
He mea hanga motuhake te mowhiti uku a St.Cera mō te whakamahi i roto i ngā rūma tukatuka CVD (Te Whakatakotoranga Kohu Matū) me te PVD (Te Whakatakotoranga Kohu Tinana). He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka mahi tēnei mowhiti hei arai rūma, hei mowhiti arotahi, hei wāhanga kete tukatuka rānei hei aukati i te plasma me te tiaki i ngā pakitara rūma mai i te horo. He pai te ātete plasma o te rauemi, he kaha dielectric teitei (15×10⁶ V/m), me te pumau wera tae atu ki te 1600°C, e whakarite ana i te roa o te ora ratonga i roto i ngā taiao plasma e hangai ana ki te fluorine. Mā ngā ātete ā-ahu tika (±0.05 mm i runga i te ID/OD) me te papatahi (≤10 μm) ka taea te whakanoho i te taha wafer rite tonu, te whakapai ake i te ōritetanga o te whakatakotoranga me te whakaiti i te whakaputanga matūriki.
Ngā Whakatakotoranga (i runga i te 99.8% Al₂O₃):
| Taonga | Uara |
| Rauemi | 99.8% Arumina (Ai) |
| Kiato | 3.93 karamu/cm³ |
| Te mimiti wai | 0% |
| Kaha Whakapiko | 361 MPa |
| Te Pakari o te Whati | 3–4 MPa·m¹/² |
| Te Pakari o Vickers | 16 GPa |
| Te Tauwehenga o te Rangatahi | 380 GPa |
| Te Arahi Wera | 32 W/m·k |
| Te Whānuitanga Wera (25–1000°C) | 7.2×10⁻⁶/℃ |
| Kaha Whakakorehiko | 15×10⁶ V/m |
| Ātete Motuhake | >10¹⁴ Ω·cm |
| Te pāmahana whakahaere mōrahi | 1600°C |
Ngā tono:
- · Ngā mowhiti arotahi rūma CVD me ngā mowhiti taha
- · Ngā mowhiti whakangungu rūma PVD me ngā mowhiti rawhi
- · Whakairohia ngā arai rūma me ngā mowhiti taupoki
- · Ngā mowhiti here plasma i roto i ngā pūnaha whakairo dielectric
Tukanga Hanga:
Te pēhi isostatic → te miihini matomato → te sintering i te 1600°C → te huri CNC ID/OD → te whakapiri mata → te horoi ultrasonic → te tirotiro 100% CMM. Ka whakaitihia te piri o te matūriki e te mutunga mata tino maeneene (Ra ≤0.4 μm).
Mana Kounga:
- · Tirotiro ā-ahu 100% (ID, OD, matotoru, papatahi)
- · Te tirotiro i te werohanga tae mō ngā kapiti moroiti o te mata
- · Whakamātautau kaha hiko-kore i runga i te ASTM D149
- · Kāore he rerekētanga e kitea ana, he pūngao rānei i raro i te karuārai 20×
Ngā Painga i runga i ngā Mowhiti Whakarewa, i ngā Mowhiti Kuata rānei:
- · 5–10× te roa ake o te ora i ngā mowhiti konumohe i roto i te plasma fluorine
- · Kāore he poke whakarewa i roto i ngā kiriata angiangi
- · He ātete teitei ake i te kiriuhi toto i te kiriuhi quartz (kāore he rua ero)
- · Ka mau tonu te whakamarumaru hiko >10¹⁴ Ω·cm ahakoa te whakamahinga roa
Rauemi Rerekē — Silicon Nitride (Si₃N₄):
Mō ngā tono e hiahia ana kia kaha ake te pakaru (6.2 MPa·m¹/²) me te ātete pai ake ki te ru wera (tau whānui 3.2×10⁻⁶/℃), kei te wātea ngā mowhiti Si₃N₄. Heoi, he iti ake te utu o te alumina mō te nuinga o ngā tono CVD/PVD. Tena koa tohua te rauemi e hiahiatia ana i te wā e tono ana.
Whakaritenga:
- · Ngā kōhao-roto, ngā kōtaha piki me ngā kōhao-ā-waea rānei hei whakairi
- · Mata pania ki te Y₂O₃ hei whakarei ake i te ātete plasma (whiringa kore)
- · Te whakairo laser o te tau wāhanga / waehere rota
Tuhipoka:Ko ngā raraunga o runga ake nei e whai pū ana i te ripanga āhuatanga Al₂O₃ kua tukuna. Mō ngā mowhiti Si₃N₄, tirohia te pepa raraunga Si₃N₄ motuhake kua whakaratohia.
