I te taha o ngā painga mahi whānui o ngā rauemi papa Al2O3 me BeO tuku iho, ko te uku Nitride Konumohe (AlN), he nui te kawe wera (ko te kawe wera ariā o te tioata kotahi he 275W/m▪k, ko te kawe wera ariā o te tioata poly he 70~210W/m▪k), he iti te pūmau dielectric, he tauwehenga whānui wera e rite ana ki te silicon tioata kotahi, me ngā āhuatanga whakamarumaru hiko pai, he rauemi tino pai mō ngā papa porowhita me te takai i roto i te umanga hiko iti. He rauemi nui hoki mō ngā wāhanga uku hanganga pāmahana teitei nā te mea he pai ngā āhuatanga miihini pāmahana teitei, ngā āhuatanga wera me te pumau matū.
Ko te mātotoru ariā o te AlN he 3.26g/cm3, ko te pakeke MOHS he 7-8, ko te ātete pāmahana rūma he nui ake i te 1016Ωm, ā, ko te whānui wera he 3.5×10-6/℃ (te pāmahana rūma he 200℃). He mārama, he kore tae ngā uku AlN parakore, engari he rerekē ngā tae pērā i te hina, te mā hina, te kōwhai mārama rānei, nā te mea he poke.
Haunga te kawe wera teitei, kei ngā uku AlN anō hoki ēnei painga e whai ake nei:
1. He pai te ārai hiko;
2. He rite te tauwehenga whānui wera ki te silicon monocrystal, he pai ake i ngā rauemi pēnei i te Al2O3 me te BeO;
3. He kaha ā-mīhini teitei, he rite te kaha piko ki ngā uku Al2O3;
4. Te pūmau dielectric me te ngaronga dielectric toharite;
5. Ki te whakatauritea ki te BeO, he iti ake te pānga o te pāmahana ki te kawe wera o ngā uku AlN, inā koa i runga ake i te 200℃;
6. Ātete pāmahana teitei me te ātete waikura;
7. Kāore i te paitini;
8. Kia whakamahia ki te umanga haurua-ira, te umanga whakarewa matū me ētahi atu mara ahumahi.
Wā tuku: Hurae-14-2023