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Te Tukatuka Whakaritenga o te Chuck Wafer Uku Al2O3
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Pereti Uku Taputapu Ārahi-Haumaru Whakaritenga a ST.CERA
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Pūwero Korehau Alumina 12-Inihi mō te Tukatuka Wafer 300mm
Ko te pūwero korehau 12-inihi a St.Cera he mea hanga ki te 99.8% alumina parakore-teitei (Al₂O₃) mō te whakahaere i te wafer 300mm. He mata kōhao pai te pūwero (te whānui kōhao 0.5–1.0 mm, te piko 2–3 mm) hei whakarite kia tohatohahia te korehau puta noa i te diameter 300mm katoa. Ka mau tonu te papatahi i roto i te 5 μm, ka taea ai te mau tonu i te wafer kore-whakapiko i te wā e tapatapahia ana, e huri ana i te taha o muri, me te tirotiro. Ko te kaha piko teitei o te rauemi (361 MPa) me te pakeke (16 GPa) e whakamana ana i te pumau o te taha roa ahakoa i raro i ngā huringa korehau maha.
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Ngā Wāhanga E manawapa ana mō ngā Taputapu Whakamātautau Āhua-whakahaere
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Kawe Taputapu Pereti Ukume Ārahi
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Ngā Taputapu Ārahi-Haumaru Ngā Wāhanga E Tāpui Ana i te Uku
I hangaia mā te pēhi matao isostatic, ā, i whakakorikoria i raro i te pāmahana teitei, kātahi ka mīhinihia me te orohia kia tika, ka taea e ngā wāhanga e toe ana o te uku te whakatutuki i ngā whakaritenga tino pakari o ngā taputapu haurua-ā-ira me ōna āhuatanga o te ātete ki te kakahu, te ātete ki te waikura, te iti o te horapa wera, me te whakamarumaru. Ka taea e ngā uku te mahi i roto i ngā momo taputapu whakaputa haurua-ā-ira maha me ngā āhuatanga pāmahana teitei, korehau, hau waikura rānei mō te wā roa.
He mea hanga mai i te paura alumina tino parakore, ka tukatukahia mā te pēhi matao isostatic, te sintering pāmahana teitei me te whakaotinga tika, ka taea te eke ki te ātete ine ki te ±0.001 mm, te mutunga mata Ra 0.1, te ātete pāmahana 1600℃.
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Mowhiti Hiri Ukume Alumina Parakore-Teitei mō te Hiritanga Rūma Pāmahana-Teitei
Kua hangaia te mowhiti hiri uku a St.Cera hei whakakapi mō ngā mowhiti-O polymer i roto i ngā taiao tino kino ka pakaru ngā elastomers. He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka whakamahia tēnei mowhiti hiri pakari i roto i ngā tono hiri pūmau — he mea hono tahi me te konganuku ngohengohe, te gasket graphite rānei — hei whakarato i te pupuri pono i te korehau, i te hau rānei i ngā pāmahana tae atu ki te 800°C me roto i ngā taiao plasma, matū rānei e kaha ana. Kāore he hau e puta mai ana i te rauemi, he kaha pēhi teitei (kaha piko o raro 361 MPa), me te koretake matū (ātete ki ngā halogens, waikawa, me ngā kawakore engari ko te HF). Mā ngā mata hiri kua oti te whakakī (papatahi ≤5 μm, taratara mata Ra ≤0.2 μm) ka whakarite kia kore e turuturu te pa ki ngā wāhanga konganuku, uku rānei.
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Mowhiti Arotahi Rūma Alumina Parakore-Teitei mō ngā Pūnaha Plasma Etch me CVD
Ko te mowhiti arotahi rūma a St.Cera he wāhanga kete tukanga nui e whakamahia ana i roto i ngā taputapu whakairo plasma, CVD, me te PVD semiconductor. He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka karapoti te mowhiti i te taha o te wafer hei whakawhāiti i te plasma me te arotau i te tohatoha koki katote, kia pai ake ai te ōrite o te whakairo puta noa i te mata o te wafer. Ka tukuna e te rauemi he ātete plasma tino pai, he kaha dielectric teitei (15 × 10⁶ V/m), me te pumau wera tae atu ki te 1600°C, e whakarite ana i te pono mo te wa roa i roto i ngā taiao plasma e hangai ana ki te fluorine, ki te chlorine rānei. Mā te ID/OD me te papatahi o te whenua (≤10 μm) ka taea te whakanoho tika i te taha o te wafer, ka whakaiti i ngā hapa taha me te whakaputa matūriki.
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Mowhiti Ukume Alumina Parakore-Teitei mō ngā Rūma Tukanga CVD / PVD
He mea hanga motuhake te mowhiti uku a St.Cera mō te whakamahi i roto i ngā rūma tukatuka CVD (Te Whakatakotoranga Kohu Matū) me te PVD (Te Whakatakotoranga Kohu Tinana). He mea hanga mai i te 99.8% alumina parakore-teitei (Al₂O₃), ka mahi tēnei mowhiti hei arai rūma, hei mowhiti arotahi, hei wāhanga kete tukatuka rānei hei aukati i te plasma me te tiaki i ngā pakitara rūma mai i te horo. He pai te ātete plasma o te rauemi, he kaha dielectric teitei (15×10⁶ V/m), me te pumau wera tae atu ki te 1600°C, e whakarite ana i te roa o te ora ratonga i roto i ngā taiao plasma e hangai ana ki te fluorine. Mā ngā ātete ā-ahu tika (±0.05 mm i runga i te ID/OD) me te papatahi (≤10 μm) ka taea te whakanoho i te taha wafer rite tonu, te whakapai ake i te ōritetanga o te whakatakotoranga me te whakaiti i te whakaputanga matūriki.
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Pūwero Korehau Uku Porowhita mō te Whakahaere Wafer Piko
He mea hanga te pūwero uku porous a St.Cera mai i te alumina tino parakore me te porosity tuwhera ōrite o te 30–45% me te rahi o ngā pūwero mai i te 10 ki te 100 μm. He rerekē ki ngā pūwero haehae noa, ka tukuna e te mata porous te korehau tohatoha puta noa i te taha o muri o te wafer, ka pupuri pai i ngā wafer piko, angiangi, takitahi rānei me te kore e hiki ake te taha, e whati rānei. Ka ārai hoki te korehau ngawari (ka taea te whakarite mā te aukati) i te tohu o te taha o muri.
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Pūwero Korehau Ukume Porowhita-Alumina mō te Whakahaere Wafer Angiangi
Ko te pūwero porous a St.Cera he mea hanga mai i te 99.6% Al₂O₃ tino parakore me te pūwero tuwhera whakahaeretia o te 30–45% me te rahi o ngā pūwero ōrite mai i te 10 ki te 50 μm. Kāore i rite ki ngā pūwero kua haehaea, ka tukuna e te mata pūwero he korehau tohatoha puta noa i te taha o muri o te wafer, ka whakakore i te tohu taha, ā, ka taea te pupuri mārie i ngā wafer tino angiangi (≤100 μm) me ngā wafer kua piko. Ka tukuna e te rauemi te kaha piko ≥250 MPa me te pumau wera tae atu ki te 400°C i te hau.
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Pereti Tohatoha Hau Alumini mō te Pane Kaukau CVD/PVD
He mea hanga tika te pereti tohatoha hau (upoko kaukau) a St.Cera mai i te uku alumina 99.8% te parakore. He maha ngā kōhao moroiti (diameters 0.3–1.5 mm) e whakarite ana i te rere ōrite o te hau puta noa i te mata o te wafer i te wā o ngā tukanga CVD, PVD, ALD rānei. Nā te kaha teitei o te dielectric o te pereti (>15×10⁶ V/m) me te ātete plasma e mea nui ai mō te whakatakotoranga kiriata angiangi semiconductor.
