Pūwero Korehau Alumina 12-Inihi mō te Tukatuka Wafer 300mm
Ko te pūwero korehau 12-inihi a St.Cera he mea hanga ki te 99.8% alumina parakore-teitei (Al₂O₃) mō te whakahaere i te wafer 300mm. He mata kōhao pai te pūwero (te whānui kōhao 0.5–1.0 mm, te piko 2–3 mm) hei whakarite kia tohatohahia te korehau puta noa i te diameter 300mm katoa. Ka mau tonu te papatahi i roto i te 5 μm, ka taea ai te mau tonu i te wafer kore-whakapiko i te wā e tapatapahia ana, e huri ana i te taha o muri, me te tirotiro. Ko te kaha piko teitei o te rauemi (361 MPa) me te pakeke (16 GPa) e whakamana ana i te pumau o te taha roa ahakoa i raro i ngā huringa korehau maha.
Ngā Whakatakotoranga (i runga i te 99.8% Al₂O₃):
| Taonga | Uara |
| Diameter | 300 mm (12 inihi) |
| Rauemi | 99.8% Arumina (Ai) |
| Kiato | 3.93 karamu/cm³ |
| Kaha Whakapiko | 361 MPa |
| Te Pakari o Vickers | 16 GPa |
| Papatahi (neke atu i te 300mm) | ≤5 μm |
| Whānui o te awaawa | 0.5–1.0 mm |
| Te Mahana Whakahaere Mōrahi | 800°C |
| Kaha Whakakorehiko | 15×10⁶ V/m |
Ngā tono:
Te tapahi me te tuhi i te papa angiangi 300mm
Te huri i te taha whakamuri o te angaanga (tautoko angaanga angiangi)
Te tirotiro me te tirotiro i ngā whatu
Ngā pūwero here/whakakore here rangitahi
Te Hanga:
I hurihia te CNC, ā, i tāpirihia kia papatahi rawa, i whakakōhaohia ki ngā wira taimana, i horoia mā te ultrasonic, ā, i tākaihia ki roto i te rūma ma o te Akomanga 100. Ka tirotirohia 100% ia pūtuki mō te papatahi (whakawhitiwhiti laser) me te hohonutanga o te kōhao (whakaahua).
Ngā Painga:
He iti te whakaputanga matūriki (≤0.05 matūriki/cm²)
Kāore e pāngia e ngā matū whakarewa me ngā waikawa
Mata haumaru-ESD (ātete >10¹³ Ω·cm)
Kei te wātea ngā tauira poka korehau ritenga me ngā putanga taha muri.
