Ngā Wāhanga Ukume Alumina Haumaru-ESD mō te Whakahaere Wafer Tairongo-Pūmau
Ko ngā wāhanga uku alumina haumaru ESD (electrostatic discharge) a St.Cera he mea hanga mai i te 99.8% Al₂O₃ parakore teitei me te ātete mata kua whakaritea o te 10⁶–10⁹ Ω/sq, ka tutuki mā te tukanga tāpiri, paninga rānei. Ka whakakorea e ēnei wāhanga te utu pateko, ka ārai i te kino hiko pateko ki ngā papa me ngā taputapu haurua-ira tairongo. Ka mau tonu te rauemi turanga i tōna kaha piko teitei (361 MPa), te pakeke (16 GPa), me te kaha dielectric (15×10⁶ V/m). Kei roto i ngā wāhanga uku haumaru-ESD ngā pito mutunga, ngā pine hiki, ngā ara ārahi, me ngā taputapu ritenga mō te aunoatanga FAB.
Ngā Whakatakotoranga(i runga i te 99.8% Al₂O₃ me te maimoatanga ESD):
| Taonga | Uara |
| Rauemi Tūāpapa | 99.8% Arumina |
| Ātete Mata (ESD) | 10⁶–10⁹ Ω/tapawhā |
| Kiato | 3.93 karamu/cm³ |
| Kaha Whakapiko | 361 MPa |
| Te Pakari o Vickers | 16 GPa |
| Te Tauwehenga o te Rangatahi | 380 GPa |
| Te Whakawhanuitanga Wera (25-1000°C) | 7.2×10⁻⁶/℃ |
| Te Mahana Whakahaere Mōrahi | 800°C |
| Kaha Whakakorehiko (papatipu) | 15×10⁶ V/m |
Kia mōhio: Kāore te ātete mata ESD i whakaratohia i roto i ngā ripanga āhuatanga rauemi kua tukuna. Ko te awhe i runga ake nei te paerewa ahumahi mō ngā uku memeha. Tena koa whakapā mai ki a mātou mō ngā pūrongo whakamātautau.
Ngā tono:
● Ngā pānga pito haumaru-ESD mō te whakawhiti wafer
● Ngā pine whenua me ngā taputapu ESD i roto i ngā taputapu FAB
● Whakamātautauhia ngā kōhao mō ngā taputapu tairongo-pūmau
● Ngā taputapu rūma ma, he mea nui te mana pupuri
Te Hanga me te Kounga:
Tukatuka alumina paerewa + maimoatanga mata ESD → ātete mata i inehia kia rite ki te ANSI/ESD STM11.11. Ka whakamatautauria 100% ia wāhanga ki tētahi irahiko mowhiti porowhita.
Ngā Painga:
● Ārai i te ngaronga hua e pā ana ki te ESD
● Ka mau tonu te kaha ā-pūkaha me te ātete matū o te uku
● Kāore he matūriki e puta mai i te tukunga pateko
