Pūwhakaputa Mutunga Ukume Silicon Carbide (SiC) – Te Pakari Nui mō te Whakahaere i te Wafer Pāmahana-Tiketike
Ko te pūwhakamahi pito uku SiC a St.Cera he mea hanga mai i te silicon carbide parakore-teitei (99.72% te ihirangi SiC, 0.05% te Si kore utu) mā te whakamahi i te rauemi puranga S1111. He tino pai ngā āhuatanga miihini: te kaha piko 449 MPa (inehia), te modulus elastic 457 GPa (inehia), me te pakeke Vickers 25–28 GPa (noa). Ko te iti o te mātotoru (3.10–3.15 g/cm³, noa) e whakarato ana i te pakari motuhake teitei, he mea pai mō ngā karetao whakawhiti wafer tere-teitei. Me te kawe wera o te 120–150 W/m·K (noa) me te tauwehenga whānui wera o te 4.0–4.5×10⁻⁶/℃ (noa), ka tino marara te wera o tēnei pūwhakamahi pito, ā, ka mau tonu te pumau o ngā āhuatanga i te wā e whakahaerea ana i te pāmahana teitei (tae atu ki te 1600–1700°C, kāore he kawenga). Ko te tae mangu/hina me te kore mimiti wai ka whakarite kia hototahi ki te rūma ma.
Ngā Whakatakotoranga(i runga i te pūrongo whakamātautau SiC S1111 kua tukuna me ngā uara noa)):
| Taonga | Uara |
| Rauemi | SiC (99.72% SiC, 0.05% Si Koreutu) |
| Tae | Pango/Hīrangi |
| Kiato | 3.10–3.15 karamu/cm³ |
| Te mimiti wai | 0% |
| Kaha Whakapiko | 449 MPa (toharite) |
| Te Pakari o te Whati | 3.12 MPa·m¹/² (toharite) |
| Tauwehenga Ātete | 457 GPa |
| Te Pakari o Vickers | 25–28 GPa |
| Te Arahi Wera (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Te Mahana Whakamahinga Mōrahi (kāore he kawenga) | 1600–1700°C |
Ngā tono:
● Te whakahaere i te wafer pāmahana teitei (muri i te whakapūmau, RTP, epitaxy)
● Ngā rūma whakairo plasma e hiahia ana kia ātete nui ki te horo
● Ngā karetao whakawhiti tere-rahi (mama, pakari)
Te Hanga:
Te whakakorikori paura SiC → te huri CNC tika o te kōtaha ringa me ngā āhuatanga whakairinga → te whakakorikori mata → te horoi ultrasonic. Te tirotiro ā-ahu 100% me te whakamātautau turuturu heriuma mō ngā tono korehau.
Mana Kounga:
● Tirotiro CMM mō te roa, te whānui, me te papatahi
● Whakamātautau kaha piko mō ia puranga (e ai ki te paerewa pūrongo whakamātautau)
● Te tirotiro ā-kanohi i raro i te karuārai mō ngā hapa o te mata
Ngā Painga i runga i te Alumina, i te Mea Whakarewa rānei:
● 2× teitei ake te modulus elastic (457 vs ~380 GPa mō te alumina) – iti ake te piko
● 3× teitei ake te kawe wera – tere ake te marara o te wera
● Ka ātete ki te >1600°C, ki te 800°C o te alumina i te rangi
● He iti ake te mātotoru i te maitai – he 40% te whakaiti i te taumaha
Whakaritenga:
Te roa 150–450 mm, ngā āhua o te pito (te pupuri taha, Bernoulli, papatahi), ngā tauira o te flange whakamau e ai ki te tuhi OEM.
*Nō te pūrongo whakamātautau kua tukuna (puranga S1111) ngā raraunga miihini katoa i runga ake nei. He mea noa ngā uara wera me te pakeke mō tēnei momo SiC; tēnā whakapā mai ki a mātou mō te tiwhikete motuhake mō te rota.*
