He Pūwero Korehau e Hangaia ana e te Silicon Carbide (SiC) mō ngā Taiao Pāmahana-Tiketike me te Plasma
Ko te pūwero uku SiC a St.Cera he mea hanga mai i te waro silicon carbide tino parakore (puranga S1111, SiC 99.72%, Si kore utu 0.05%). Ka tukuna e ia te kaha piko kua inehia o te 449 MPa, te pakari pakaru o te 3.12 MPa·m¹/², me te modulus elastic o te 457 GPa. Ko te kawe wera noa o te rauemi (120–150 W/m·K) me te iti o te horapa wera (4.0–4.5×10⁻⁶/℃) ka taea te piki tere i te pāmahana me te iti o te piko o te wafer i te huringa wera. Ka taea te whirihora i te chuck hei chuck korehau porous (rere hau ōrite) hei chuck paerewa kua haehaea rānei. Me te pāmahana whakamahinga mōrahi o te 1600–1700°C (kāore he kawenga) me te ātete tino pai ki te horo o te plasma, he pai tēnei chuck mō te tukatuka wafer pāmahana teitei (whakamahana, RTP) me ngā rūma keri kaha e pakaru ana ngā chuck alumina.
Ngā Whakatakotoranga(i runga i te pūrongo whakamātautau SiC S1111 kua tukuna me ngā uara noa)):
| Taonga | Uara |
| Rauemi | SiC (99.72% SiC, 0.05% Si Koreutu) |
| Kiato | 3.10–3.15 karamu/cm³ |
| Te mimiti wai | 0% |
| Kaha Whakapiko | 449 MPa |
| Te Pakari o te Whati | 3.12 MPa·m¹/² |
| Tauwehenga Ātete | 457 GPa |
| Te Pakari o Vickers | 25–28 GPa |
| Te Arahi Wera | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Te Mahana Whakamahinga Mōrahi (kāore he kawenga) | 1600–1700°C |
| Papatahi (neke atu i te 300mm) | ≤5 μm |
| Whakaotinga Mata | Ra ≤0.4 μm (tāpirihia) |
Ngā tono:
● Te maka i te pāmahana teitei (whakamahana, RTP, tipu epitaxial)
● Pūwero whakairo plasma me te ātete nui ki te hauhā
● Te whakahaere i te anga angiangi me te whakamahana/whakamatao ōrite
● He pūwero porotaka mō te tautoko i te anga kore-pa
Te Hanga:
Te whakakorikori SiC → te huri tika o te papatahi me te kōtaha mata → te hanganga hanganga porous kōwhiringa (mō te chuck korehau) → te whakakorikori → te horoi ultrasonic. Ka tirotirohia 100% ia chuck mō te papatahi (interferometer laser) me te ōritetanga korehau (whakamātautau rere).
Mana Kounga:
● Tirotiro i ngā āhuatanga CMM (diameter, matotoru, tūnga kōhao)
● Te ine i te papatahi i runga i te ASTM
● Whakamātautau turuturu heriuma (mō ngā pūwero korehau)
● Manatoko kaha piko mō ia puranga (tirohia te pūrongo whakamātautau)
Ngā painga ki ngā Alumina Chucks:
● Te kawe wera teitei ake (120–150 vs 32 W/m·K mō te alumina) – 4× te tere ake o te whakawhiti wera
● CTE iti iho (4.0 vs 7.2×10⁻⁶/℃) – ka whakaiti i te ahotea wera o te wafer
● Te ātete pai rawa atu ki te toto – 10× te roa ake o te ora i roto i te whakairo fluorine
● Te pāmahana whakamahinga mōrahi teitei ake (1600°C vs 800°C mō te alumina)
Whakaritenga:
● Mata pūwero, mata awaawa rānei
● Te whānui 100–450 mm, porowhita, tapawhā rānei
● Mowhiti hiri taha, ārai korehau rohe rānei
● Kōwhiringa tautoko whakarewa mō te whakamau pakari
Nō te pūrongo whakamātautau kua tukuna mai (puranga S1111) ngā raraunga miihini katoa o runga ake nei. He mea noa ngā uara wera me te pakeke mō tēnei momo SiC. Me tukatuka anō ngā chuck SiC porous; tēnā pātai atu mō te wātea o te porous me te rahi o ngā pore.
