-
Ringa Rōpoti Ukume Alumina Parakore-Teitei mō te Whakahaere Wafer
He mea hanga te ringa karetao uku alumina a St.Cera mā te tino tika mai i te 99.8% Al₂O₃ (alumina) tino parakore. Ka whakakotahi i te kaha piko tino pai (361 MPa), te pakeke teitei (16 GPa), me te iti o te mātotoru (3.93 g/cm³), ka hua ake he ringa māmā engari he pakari mō te whakawhiti i te anga haurua-haurua. Ka ōrite te tauwehenga whānui wera o te rauemi (7.2×10⁻⁶/°C) ki te silicon, ka whakaiti i te kore ōritenga wera i te wā tukatuka.
-
Pūwhakaputa Mutunga Uku Bernoulli — Te Whakahaere i te Wafer Kore-Pa atu mō ngā Wafer Angiangi me te Pakaru
Ka whakamahia e te taputapu pito uku Bernoulli a St.Cera te hiki ā-rangi hei whakahaere i ngā papa me te kore e pā atu ki te tinana. He mea hanga mai i te 99.8% alumina (Al₂O₃) te silicon carbide (SiC) rānei, he tino parakore, ā, kei roto ngā pūwero mīhini-tika e pana ana i te hau pēhanga hei hanga i tētahi kiriata hau angiangi i waenganui i te taputapu pito me te papa. Mā tēnei mātāpono kore-pā ka whakakorea te poke o te taha o muri, te pakaru o te taha, me te kino o te mata, he mea tino pai mō ngā papa angiangi (≤100 μm), pakarukaru, piko rānei. Ka whakaratohia e te papa uku he kaha piko teitei (361 MPa mō te Al₂O₃; tae atu ki te 550–600 MPa mō te SiC), he iti te papatipu, me te pumau o te āhua, e whakarite ana i te tūnga ka taea te whakahoki i roto i ngā karetao whakawhiti papa tere-teitei.
-
Pūwhakaputa Ukume Panipani Teflon – Mata Kore-Pīpiri mō te Whakahaere Wafer Tairongo
Ko te taputapu pito uku kua pania ki te Teflon (PTFE) a St.Cera e whakakotahi ana i tētahi papa alumina kaha-teitei me tētahi paninga PTFE ōrite, iti-waku (matotoru 15–30 μm). Ka whakaratohia e te paninga he tauwehenga waku tino iti (≤0.1), he ātete matū pai rawa atu, me ngā āhuatanga kore-piri, e ārai ana i te piri o te papa whakarewa me te whakakore i te poke o te taha o muri. Ko te papa uku kei raro (99.8% Al₂O₃) e tuku ana i te kaha piko teitei (361–1000 MPa), te ātete kakahu, me te pumau wera tae atu ki te 260°C (te rohe paninga). He pai tēnei taputapu pito mō te whakahaere i ngā papa whakarewa ngawari, angiangi, piri rānei (hei tauira, i muri i te paninga photoresist, i ngā tukanga matū rānei).
