Chuck Korehau SiC Porous-Tukua-Metara mō te Whakahaere Wafer Piko me te Angiangi
Ka whakakotahi te pūwero uku whakarewa a St.Cera i tētahi paparanga uku silicon carbide (SiC) porous me tētahi turanga whakarewa i hangaia kia tino tika (konumohe, maitai kore waikura rānei). Mā te rauemi SiC porous (kikorangi-mangu, porosity 35–40%, rahi o te pūwero 20–30 μm, uruhanga 60 ml/cm²·min) ka tohatohahia te korehau kia ōrite, kia ngawari puta noa i te mata o te papa, ka whakakorea te tohu taha, ā, ka taea te tautoko kore-pa mō ngā papa angiangi (≤100 μm) kua piko rānei. Ka tukuna e te paparanga SiC he iti te whānui wera (3.5×10⁻⁶/℃), he pumau wera tae atu ki te 1000°C, me te kaha piko ngawari (32–35 MPa). Ka tāpirihia e te turanga whakarewa he pakari hanganga, he ngāwari te whakairi mā roto i ngā kōhao miro, me te tiaki i te pakaru pakarukaru. He pai tēnei pūwero mō te huri i te taha o muri, te tapatapahi, me te tukatuka papa pāmahana teitei i te mea he mea nui te korehau me te hototahi wera.
Ngā Whakatakotoranga (i runga i ngā raraunga SiC porous kua tukuna):
| Taonga | Uara |
| Rauemi uku | Karāpire Hiraka Porowhita (SiC ≥80%) |
| Tae | Pango-kikorangi |
| Pūngao | 35–40% |
| Rahi o te Pūwero | 20–30 μm |
| Kiato | 2.1–2.3 karamu/cm³ |
| Āheitanga uruhanga | 60 ml/cm²·min |
| Kaha Whakapiko | 32–35 MPa |
| Tauwehenga Whānui Wera (25-1000°C) | 3.5×10⁻⁶/℃ |
| Te pāmahana whakahaere mōrahi | 1000°C |
| Ātete Hiko | 10⁻¹⁰ Ω/cm (mō ngā raraunga kua tukuna, he mea noa mō te SiC porous) |
| Rauemi Tūāpapa Whakarewa | Konumohe 6061, Kowiri tira rānei 304 (whiringa kore) |
| Matotoru o te Tūāpapa Whakarewa | 10–30 mm (whakaritenga) |
Kia mōhio: He iti ake te kaha piko i te SiC matotoru nā te mea he porosity. Kāore ngā āhuatanga turanga whakarewa i ahu mai i ngā tēpu uku.
Ngā tono:
- · Te huri i te taha whakamuri o ngā angiangi (≤100 μm)
- · Te whakapiringa angiangi piko mō te tapatapahi
- · Te maka i te wafer i te pāmahana teitei (tae atu ki te 1000°C)
- · Whakamau korehau mō ngā papa porowhita, pakarukaru rānei
Te Hanga:
Pereti SiC pūweru (i hangaia ki ngā kaihanga pūweru, i whakakāhia) → i whakapirihia kia papatahi ≤10 μm → turanga whakarewa i mīhinihia me ngā putanga korehau me ngā āhuatanga whakamau → here epoxy, whakapūmau ā-ringa rānei → whakamātautau turuturu heriuma.
Mana Kounga:
- · Kua manatokohia te pūngao me te rahi o ngā pūngao e te SEM
- · Whakamātautau uruhanga (rerenga hau)
- · I inehia te papatahi ki te ine whakawhiti laser
- · Te tere turuturu o te hauhā <1×10⁻⁹ Pa·m³/s
Ngā Painga i runga i ngā Chuck Ukume Āwhata, i ngā Chuck Uku Matotoru rānei:
- · Kāore he tohu wafer – he korehau ōrite, kāore he kōhao motuhake
- · Ngā pore horoi-ake – te whakaiti i te aukati
- · Ka mau i ngā anga piko (tae atu ki te 500 μm te whānui)
- · Ka ārai te turanga whakarewa i te pakarukaru, ā, ka māmā ake te whakaurunga
Ngā Here:
- · Kaha piko iti iho (32–35 MPa) – karohia te taumahatanga pānga
- · Ko te pāmahana whakahaere he iti noa ki te 1000°C (SiC porous), engari ko te here epoxy turanga whakarewa he iti noa ki te ≤200°C mēnā kāore i te herea ā-ringa
- · Kāore mō te korehau pēhanga teitei (ka whakawhāitihia e te hanganga pūwero te rerekētanga korehau mōrahi)
Whakaritenga:
- · Turanga whakarewa: konumohe (māmā), maitai kore waikura (ātete ki te waikura), Invar (iti te whānui)
- · Hononga: epoxy (≤200°C) he rawhi ā-ringa rānei (tae atu ki te 500°C)
- · Mowhiti hiri taha mō te whakahaere korehau rohe
Kia mōhio mai: Ko te kaha piko e tukuna ana (32–35 MPa) he iti iho i ngā uku matotoru nā te mea he porous. Kia tupato te whakahaere kia kore ai e pakaru ngā taha.
